Helicon sputtering
Webthe helicon-sputter-deposition-system installed in the deposi-tion chamber of the PGCCD system. We set an Fe30at%Co alloy disc target, whose diameter was 60mm and … Web15 nov. 1997 · Carbon nitride films have been synthesized on Si(100) substrates by using DC sputtering assisted with a high density m=0 mode helicon wave-excited plasma in Ar and N2 mixture. The composition, structure and bonding state of the films were investigated by X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FT-IR) …
Helicon sputtering
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WebCO sputter system capable of simultaneous and multilayer film formation. Av028 Ultra-high vacuum helicon sputtering system. Specifications ・Specimen types: Cu, Ta, FeNi, … Web20 dec. 2004 · Highly c-axis-oriented aluminum nitride (AlN) thin films were prepared on polycrystalline Si 3 N 4 and SiC substrates by helicon plasma sputtering. The …
Web6 okt. 2024 · ABSTRACT. The definition of a magnetic shuttle is introduced to describe the magnetic space enclosed by two magnetic mirrors with the same field direction and high … Web14 okt. 2024 · Keywords: helicon wave plasma, reactive sputtering, tungsten nitride, plasma diagnosis (Some figures may appear in colour only in the online journal) 1. …
WebSputtering metals and alloys with a magnetron target is easy, and it is convenient for ignition and sputtering. Magnetron reactive sputtering insulators appear to be easy, but … Web3 aug. 2024 · The helicon plasma DC magnetron sputtering method was used to fabricate thin films at a low deposition temperature due to the low heat resistance of plastic …
Web7 mei 2002 · AlN thin films were grown on SiO2/Si and quartz substrates using a helicon sputtering system. The dependence of film quality on growth parameters, such as total …
Web21 feb. 2024 · Description: The use of helicon sources as thrusters for space propulsion has been envisaged as a robust, scalable, reliable and long-life device. The Helicon Plasma … lub d brand officeWeb16 nov. 2011 · The mechanical properties and deformation behaviors of AlN thin films deposited on c -plane sapphire substrates by helicon sputtering method were … lub of 10 and 15Web22 mei 2024 · Development of electrodeless radiofrequency plasma thrusters, e.g., a helicon thruster, has been one the of challenging topics for future high-power and long … pactiv cake containersWeb1 mrt. 1995 · A sputtering system which utilizes a pair of helicon plasma cathodes has been developed for the fabrication of multilayer x‐ray mirrors. The helicon plasma … pactiv bridgeview ilWebWilt u meer weten over Integrated Pest Management, of heeft u een (advies-)vraag voor ons? Neem contact op met: Laurens van Dam, Manager Consultancy. … pactiv clear hinged containersWeb1. “Anomalous transport in high power impulse magnetron sputtering” D. Lundin, U. Helmersson, S. Kirkpatrick, S. Rohde, and N. Brenning Plasma Sources Sci. Technol. … pactiv clearview smartlock containersWebSputtering. Magnetic Multi-Layer System Magest S200; Load-lock-type Sputtering System CS-200; Back Side Metallization Sputtering System SRH-530; Cluster-type Sputtering … pactiv corporation columbus oh 43228